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Planar Positioning Systems |
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Written by Sven Herrmann
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Thursday, 09 July 2009 12:14 |
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Functionality
- Direct drive with electrodynamical principle
- Slider (rotor) aerostatic guided, free to move in two directions
- Mechanical power generation by moveable permanent magnets and fixed coils
- Torsion of the slider interlocked by fi eld forces, torsion active controllable
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Advantages
- Highest accuracy, repeatability, resolution and position stability by a play free direct drive with an optical grid for position measurement
- Very high dynamic, velocity range, and excellent even speed properties
- Low-maintenance, no wear and low friction by air bearings
- High stiffness up to maximum force of the drive
- No deformation during the motion by planar drive structure
- Low installation height, low noise, Cleanroom compatible
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| Technical parameters |
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PPS
100-3
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PPS
200-4 |
PPS
250-4 |
| travel range |
Smax [mm]
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Ø 100 |
□ 200 |
□ 250 |
active yaw
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φ [°] |
± 0,25(±0,5) [°] |
path accuracy
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x, y [μm] |
± 1 (0,1) 2 5 |
| position resolution |
[nm] |
20 (1)2
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| repeatability |
[nm] |
100 |
| minimum increment |
Δs [nm]
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10 |
acceleration
@ payload
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a[m/s2]
[kg]
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20 3
0,5
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18 3
5
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16 3
5
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| velocity |
Vmax [mm/s]
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... 500 3
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| stability of the velocity |
Δv [%]
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< 1 (v > 5mm/s)
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| payload |
mmax [kg]
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2,5 |
5 |
15 |
| pitch/roll error |
Δφx, Δφy [arc sec]
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± 0,5
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span of air bearing
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[mm] |
216 4
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427 4
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524 4
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planarity of the stator
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Δz [ym]
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< 1 |
| yaw error |
Δφz [arc sec]
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± 4 |
size (LxWxH)
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[mm]
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700
x 700
x 220
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1.000
x 900
x 300
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1.200
x 1.000
x 300
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mass
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[kg]
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288
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585
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875 |
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Last Updated on Thursday, 27 August 2009 14:15 |
